| Code | Range | Accuracy | Resolution | Repeatability | Magnification | Max. load |
|---|---|---|---|---|---|---|
| ISD-R320 | 300×200×200mm | ≤(3+L/200)μm (L is the measuring length in mm) | 0.5μm | 2μm | 37.2X~236.0X (on 21.5'' monitor) | 20kg |
| ISD-R430 | 400×300×200mm | ≤(3+L/200)μm (L is the measuring length in mm) | 0.5μm | 2μm | 37.2X~236.0X (on 21.5'' monitor) | 20kg |
| ISD-R540 | 500×400×200mm | ≤(3+L/200)μm (L is the measuring length in mm) | 0.5μm | 2μm | 37.2X~236.0X (on 21.5'' monitor) | 20kg |




