| Code | Range | Accuracy | Resolution | Repeatability | Magnification | Max. load |
|---|---|---|---|---|---|---|
| ISD-E320 | 300×200×200mm | ≤(2.5+L/200)µm (L is measuring length in mm) | 0.5µm | 2µm | 33X~208.6X (on 24'' monitor) | 30kg |
| ISD-E430 | 400×300×200mm | ≤(3.5+L/200)µm (L is measuring length in mm) | 0.5µm | 2µm | 33X~208.6X (on 24'' monitor) | 30kg |




