| Code | Parallelism | X-axis displacement | Micrometer graduation | Micrometer accuracy | Stage size |
|---|---|---|---|---|---|
| 6582-401 | 0.02mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6582-601 | 0.03mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6582-901 | 0.03mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6582-1251 | 0.04mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |
| 6582-402 | 0.02mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6582-602 | 0.03mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6582-902 | 0.03mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6582-1252 | 0.04mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |
| 6582-403 | 0.02mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6582-603 | 0.03mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6582-903 | 0.03mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6582-1253 | 0.04mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |




