| Code | Range | Accuracy | Repeatability |
|---|---|---|---|
| VIM-L40 | view field: Ø26mm/Ø40mm; depth of field: 10mm/20mm | ±2μm/±3μm | ±1μm |
| VIM-L65 | view field:Ø40mm/Ø65mm;depth of field:20mm/30mm | ±3μm/±4μm | ±1μm |
| VIM-L120 | view field: Ø60mm/Ø120mm; depth of field: 20mm/40mm | ±4μm/±5μm | ±2μm |




