| Code | Roughness (Ra) | Shape | Deviation | Uniformity |
|---|---|---|---|---|
| ISR-LS601 | 0.1µm | square wave | -20% ~ +10% | 3% |
| ISR-LS602 | 0.2µm | square wave | ±10% | 3% |
| ISR-LS603 | 0.4µm | square wave | ±10% | 3% |
| ISR-LS604 | 0.8µm | square wave | ±10% | 3% |
| ISR-LS605 | 1.6µm | square wave | ±10% | 3% |
| ISR-LS606 | 3.2µm | square wave | ±10% | 2% |
| ISR-LS607 | 6.4µm | square wave | ±10% | 2% |
| ISR-LS601S | 0.1µm | simulated sine wave | -20% ~ +10% | 3% |
| ISR-LS602S | 0.2µm | simulated sine wave | ±10% | 3% |
| ISR-LS603S | 0.4µm | simulated sine wave | ±10% | 3% |
| ISR-LS604S | 0.8µm | simulated sine wave | ±10% | 3% |
| ISR-LS605S | 1.6µm | simulated sine wave | ±10% | 3% |
| ISR-LS606S | 3.2µm | simulated sine wave | ±10% | 2% |
| ISR-LS607S | 6.4µm | simulated sine wave | ±10% | 2% |




