Spectroscopic Ellipsometer

Applicable to scientific research, semiconductors, photovoltaics, optical coatings, display panels, etc.

Based on dual-rotating-compensator modulation technology, it enables one-time acquisition of spectra such as Psi(Ψ)/Delta(Δ) and N/C/S, and can achieve rapid analysis of the thickness and optical properties of single-layer to multi-layer micro-nano films on substrates

Used for measuring parameters such as substrate and film layer thickness (d), refractive index (n), extinction coefficient (κ), and dielectric constant (ε)